IEC 62047-10-2011 半导体器件.微电子机械器件.第10部分:MEMES材料微极压缩测试
时间:2024-05-08 02:05:03 来源: 标准资料网 作者：标准资料网 阅读：9225
【英文标准名称】:Semiconductordevices-Micro-electromechanicaldevices-Part10:Micro-pillarcompressiontestforMEMSmaterials
【原文标准名称】:半导体器件.微电子机械器件.第10部分:MEMES材料微极压缩测试
【标准号】:IEC62047-10-2011
【标准状态】:现行
【国别】:国际
【发布日期】:2011-07
【实施或试行日期】:
【发布单位】:国际电工委员会(IX-IEC)
【起草单位】:IEC/SC47F
【标准类型】:()
【标准水平】:()
【中文主题词】:
【英文主题词】:Compression;Compressionstresses;Compressiontests;Electricalengineering;Materials;Microelectronics;Microsystemtechniques;Pressuretests;Properties;Samples;Semiconductordevices;Systemengineering;Tensilestrain;Tensiletesting;Testing;Testingdevices;Testingsystem;Thinfilms;Thin-filmdevices;Thin-filmtechnology
【摘要】:
【中国标准分类号】:L40
【国际标准分类号】:31_080_99;31_220_01
【页数】:22P;A4
【正文语种】:英语
【英文标准名称】:Accountingsoftware-ValuedAddedTaxintheUK-Specification
【原文标准名称】:会计软件.英国的增值税.规范
【标准号】:BSPAS76-2006
【标准状态】:作废
【国别】:英国
【发布日期】:2006-01-20
【实施或试行日期】:2006-01-20
【发布单位】:英国标准学会(BSI)
【起草单位】:BSI
【标准类型】:()
【标准水平】:()
【中文主题词】:会计;计算机软件;税收
【英文主题词】:Accounting;Computersoftware;Taxation
【摘要】:
【中国标准分类号】:A11;L77
【国际标准分类号】:35_240_40
【页数】:
【正文语种】:英语
【英文标准名称】:Metallicandotherinorganiccoatings-Measurementofmassperunitarea-Reviewofgravimetricandchemicalanalysismethods
【原文标准名称】:金属和其他无机覆盖层单位面积质量的测量重量分析法和化学分析方法评述
【标准号】:ISO10111-2000
【标准状态】:现行
【国别】:国际
【发布日期】:2000-06
【实施或试行日期】:
【发布单位】:国际标准化组织(IX-ISO)
【起草单位】:ISO/TC107
【标准类型】:()
【标准水平】:()
【中文主题词】:无机物的;金属覆层;测定;金属;调查;密度测量;化学分析和试验;重量分析;定义;非金属覆层;试验;覆层
【英文主题词】:Chemicalanalysisandtesting;Coatings;Definitions;Densitymeasurement;Determination;Gravimetricanalysis;Inorganic;Metalcoatings;Metals;Methodsofanalysis;Non-metalliccoatings;Surveys;Testing
【摘要】:1GeneralThisInternationalStandardoutlinesgeneralmethodsfordeterminingtheaveragesurfacedensityoverameasuredareaofanodicoxideorofacoatingdepositedautocatalytically,mechanically,bychemicalconversion,byelectrodeposition,byhotdipgalvanizingandbyvacuumusinggravimetricandotherchemicalanalysisproceduresthathaveattainedsomedegreeofnationalorinternationalstandardization.Avarietyofproceduresaredescribedandinclude:—gravimetricproceduresforchemicalorelectrochemicaldissolutionofthecoatingorthesubstratetodeterminethecoatingsurfacedensity;—analyticalproceduresthatutilizedissolutionofthecoatingforphotometricorvolumetricdeterminationofthecoatingsurfacedensity;—non-destructiveinstrumentalphysicalanalysisofthecoatingtodeterminethesurfacedensity.WiththeexceptionofthegravimetricmethoddescribedinISO3892:—thisInternationalStandarddoesnotgivethemeasurementuncertaintiesofthemethodscited.2SourcesThestrippingmethodscitedinannexAaredescribedinspecificationsintheopenliteratureorhavebeenusedroutinelybyatleastonelaboratory.3RestrictionsTheproceduresdescribedcanbeusedformanycoating-substratecombinations.Theycannotbeusedwhereneitherthecoatingnorsubstratematerialcanbecompletelyremoved,onefromtheotherbychemicalorphysicalmeansandthereisaconstituentcommontoboththatisnotreadilyseparated(e.g.nickelphosphorusalloyonnickel).NOTEThemeasurementofverythincoatingsonverysmallpiecescanresultinareductioninaccuracyandalackofrepeatability.Severalmeasurementsusingacombinationofdifferentproceduresonsimilarsamplesmightovercomethissituation.4LimitationsInprinciple,thegravimetricprocedurescanbeusedtomeasureverythincoatingsortomeasurecoatingsoversmallareas,butnotthincoatingsoversmallareas.Thelimitsdependontherequiredaccuracy;e.g.,2,5mg/cmofcoatingmightrequire1cm,but0,1mg/cmofcoatingwouldrequire25cmtoobtain2,5mgofcoating.Theselimitationsdonotapplytothechemicalanalysismethods.Thegravimetricmethoddoesnotindicatethepresenceofbarespotsorsiteswiththicknesseslowerthanthespecifiedminimuminthemeasuringareas.Inaddition,thesinglevalueobtainedfromeachmeasuringareaisthemeanthicknessofthatarea.Therecanbenofurthermathematicalanalysisofthissinglevalue,forexample,forstatisticalprocesscontrolpurposes.
【中国标准分类号】:A29
【国际标准分类号】:25_220_40;25_220_99
【页数】:15P.;A4
【正文语种】:英语